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Ion Milling Process for Manufacturing Magnetic Heads

IP.com Disclosure Number: IPCOM000076194D
Original Publication Date: 1972-Jan-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Chang, PT: AUTHOR [+4]

Abstract

A magnetic head is contoured to a desired smooth shape by an ion milling process. In the process, a finished core has its gap area masked with a coating of aluminum using known sputtering, evaporating or photoresist technology. The thickness of the coating is determined from the sputtering rate and the depth of cut required.

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Ion Milling Process for Manufacturing Magnetic Heads

A magnetic head is contoured to a desired smooth shape by an ion milling process. In the process, a finished core has its gap area masked with a coating of aluminum using known sputtering, evaporating or photoresist technology. The thickness of the coating is determined from the sputtering rate and the depth of cut required.

The core is then placed in an ion milling apparatus and exposed to an ion beam impinging on the coated surface. Successful results have been obtained when the beam impinges at an angle of 15 degrees to the horizontal and parallel to the masked gap. The core is successively remasked and re-exposed to the ion beam until the desired cut depth is achieved. Exposure to the beam for one hour will remove one micron of ferrite. Rounded shoulders result when thick layers of mask material with tapered and undercut edges are utilized. The extent of edge taper can be controlled by the use of the appropriate coating technology.

To protect surfaces from being accidentally milled, a head assembly is placed under a steel shield having a slot for exposing the core.

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