Browse Prior Art Database

Centrifuge Dryer

IP.com Disclosure Number: IPCOM000076257D
Original Publication Date: 1972-Feb-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 39K

Publishing Venue

IBM

Related People

Fink, OJ: AUTHOR [+3]

Abstract

To dry semiconductor wafers upon which, for example, a photoresist has been exposed and developed, it is necessary to position the wafers in a centrifuge-type apparatus to facilitate such drying. As illustrated, basket 10, comprising circumferentially extending upstanding wall 11, is driven as by shaft 12 (Fig. 2) which is coupled to the basket interiorly of central housing 13. The interior of basket 10 is divided into wafer carrier receiving chambers 14A, 14B, 14C and 14D. Intermediate each of the receiving chambers are support struts 15, the side walls 15A, 15B of which form the side walls for receiving wafer carriers 16 therebetween.

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Centrifuge Dryer

To dry semiconductor wafers upon which, for example, a photoresist has been exposed and developed, it is necessary to position the wafers in a centrifuge-type apparatus to facilitate such drying. As illustrated, basket 10, comprising circumferentially extending upstanding wall 11, is driven as by shaft 12 (Fig. 2) which is coupled to the basket interiorly of central housing 13. The interior of basket 10 is divided into wafer carrier receiving chambers 14A, 14B, 14C and 14D. Intermediate each of the receiving chambers are support struts 15, the side walls 15A, 15B of which form the side walls for receiving wafer carriers 16 therebetween. The wafer carriers include depending leg portions 16A, 16B, the leg portion 16A being adapted for capture in a slot 17 located in wall 11 in each of the carrier receiving housings or chambers 14. Each of the slots 17 is spaced from bottom wall 11B of the basket less than the length of the carrier 16 to insure capture of the leg 16A in the slot 17, and to insure that the carrier will be sloped away from the central axis of the basket (see Fig. 2). Additionally, inwardly spaced and upturned flange 18 is provided about the periphery of bottom wall 11B, insuring that the leg 16B of the carrier cannot move outward due to the centrifugal force of rotation of the basket. In this manner, a carrier loaded with wafers may be easily installed and removed without wafers falling out of the carrier and becoming damaged.

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