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Sealed Quartz Ware Venting Tool

IP.com Disclosure Number: IPCOM000076259D
Original Publication Date: 1972-Feb-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 34K

Publishing Venue

IBM

Related People

Cosgrove, JF: AUTHOR [+2]

Abstract

A vacuum sealed capsule, such as used in capsule diffusion processes, can be safely vented by use of the simple tool shown. Quartz capsule 1, containing source powder 2 and wafers 3, is evacuated and sealed in a conventional manner using a torch at area 4. After the sealed capsule has been subjected to the diffusion operation, it is necessary to vent the sealed capsule slowly and carefully so as not to disturb or damage the contents comprising the diffused silicon wafers. Implosion might result if the venting is accomplished too rapidly, with consequent damage to the diffused wafers from flying quartz particles or source powder.

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Sealed Quartz Ware Venting Tool

A vacuum sealed capsule, such as used in capsule diffusion processes, can be safely vented by use of the simple tool shown. Quartz capsule 1, containing source powder 2 and wafers 3, is evacuated and sealed in a conventional manner using a torch at area 4. After the sealed capsule has been subjected to the diffusion operation, it is necessary to vent the sealed capsule slowly and carefully so as not to disturb or damage the contents comprising the diffused silicon wafers. Implosion might result if the venting is accomplished too rapidly, with consequent damage to the diffused wafers from flying quartz particles or source powder.

Reproducibly safe venting is accomplished through the use of a modified centering punch 5, whose standard tip is removed and replaced by the tip 6 from a conventional carbide scriber. In addition, the relatively heavy duty spring is removed from the standard center punch and replaced with a lighter spring. The resulting modified structure provides a repeatable impact force to the closed capsule, to permit a small hole opening and to allow the capsule to return to ambient pressure without implosion.

It is preferred that the vending holes be located in area 4 where the quartz ware is relatively brittle as a result of the torch treatment by which the capsule was previously sealed.

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