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Adjustable Low Loss Electrode

IP.com Disclosure Number: IPCOM000076283D
Original Publication Date: 1972-Feb-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 65K

Publishing Venue

IBM

Related People

Hassan, JK: AUTHOR [+2]

Abstract

This electrode uses a welded stainless steel bellows assembly 10, instead of the conventional rigid structure currently used to provide vacuum integrity in a sputtering system. The support required for the electrode is provided by a rotary-to-linear type drive or actuator 11, which is linked via an insulating shaft 12 to the coolant pipes 13. This allows the electrode height to be continuously adjusted. This action can be accomplished during sputtering, if desired, since unlike existing system, no physical changes are required. This feature provides two distinct advantages. It allows a variation of electrode spacing without any system down time and the direct observation of the in-process effects of varying this parameter.

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Adjustable Low Loss Electrode

This electrode uses a welded stainless steel bellows assembly 10, instead of the conventional rigid structure currently used to provide vacuum integrity in a sputtering system. The support required for the electrode is provided by a rotary-to-linear type drive or actuator 11, which is linked via an insulating shaft 12 to the coolant pipes 13. This allows the electrode height to be continuously adjusted. This action can be accomplished during sputtering, if desired, since unlike existing system, no physical changes are required. This feature provides two distinct advantages.

It allows a variation of electrode spacing without any system down time and the direct observation of the in-process effects of varying this parameter.

The electrode 14 has a parallel feed cooling passage configuration which maintains high-structural strength, while providing a low impedance to flow and optimum cooling. The parallel feed configuration uses a series of equal width cooling passages 15. Because of the configuration, the motion of the fluid causes a proportional pressure increase at the inlet side of the channels as the radius increases and a decrease at the outlet side as the radius increases. This results in a radial front-type flow through the passages. That is, the fluid velocity is proportional to the radius and hence length of the passage. This type of flow provides approximate uniform per unit area cooling over the entire electrode surface.

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