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Ion Distribution Detection

IP.com Disclosure Number: IPCOM000076306D
Original Publication Date: 1972-Feb-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 3 page(s) / 32K

Publishing Venue

IBM

Related People

Magill, PJ: AUTHOR [+3]

Abstract

This arrangement provides a method of measuring ion distribution. As an example, the two-dimensional cross-section of ions in a gas stream flowing through an electroionic flow device has been determined.

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Ion Distribution Detection

This arrangement provides a method of measuring ion distribution. As an example, the two-dimensional cross-section of ions in a gas stream flowing through an electroionic flow device has been determined.

It has been found that low-energy ions react with various oxide films, tungsten and molybdenum in particular, and presumably with others. The reaction is such as to produce a visible change in the light transmission of such films in areas that have been contacted by ions. As a result, one can determine ion distribution through ion flow devices)

The change observed thus far is assumed to be due to the generation of color centers in the case of positive ions and the extinction or removal of color centers in the case of negative ions. The exact mechanism is unknown, and the usual explanations of the origin of color centers and removal of them are unsatisfactory in the present case - due primarily to the fact that the ions producing the charge are very low energy, i.e., essentially thermal, 0.025 V. The possibility that the centers are due to chemical or composition change is unlikely, since positive nitrogen and argon ions are also effective in producing the change.

Regardless of the exact mechanism of formation, films showing such characteristics can be used as a diagnostic tool to determine ion distribution, as shown in the drawing.

The ion flow device 3 may be a corona charging device for printing; electrostatic precipitation; a deionizer or other devices. As shown, the desired ions which emerge from the device are moved toward the sensitive layer 5, by the electrostatic field produced by application of a voltage from source 7 across the gap d, in which conductive layer 9 is involved. By altering the polarity, one can examin...