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Glass Mask Process Rack

IP.com Disclosure Number: IPCOM000076427D
Original Publication Date: 1972-Mar-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 34K

Publishing Venue

IBM

Related People

Kennison, RE: AUTHOR [+2]

Abstract

A glass mask process rack utilizing support members, having a circular cross-section area for contacting the edges of the glass masks, minimizes contact damage to the glass masks and entrapment of process solutions between the masks and the holding members. The rack 10 (Fig. 1) has support rods 12 of circular cross section, each having a plurality of slots 14, into which a glass mask 15 may rest, as best shown in Fig. 2. The sides 16 of the slots 14 are inclined at a relatively small angle, such as about 15 degree, from the vertical. A glass mask holder of this configuration reduces contact area between the glass mask and the holder to a minimum, thus reducing solution entrapment and damage to the masks by contact.

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Glass Mask Process Rack

A glass mask process rack utilizing support members, having a circular cross-section area for contacting the edges of the glass masks, minimizes contact damage to the glass masks and entrapment of process solutions between the masks and the holding members. The rack 10 (Fig. 1) has support rods 12 of circular cross section, each having a plurality of slots 14, into which a glass mask 15 may rest, as best shown in Fig. 2. The sides 16 of the slots 14 are inclined at a relatively small angle, such as about 15 degree, from the vertical. A glass mask holder of this configuration reduces contact area between the glass mask and the holder to a minimum, thus reducing solution entrapment and damage to the masks by contact.

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