Browse Prior Art Database

System of Stacking Wafers

IP.com Disclosure Number: IPCOM000076815D
Original Publication Date: 1972-Apr-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 3 page(s) / 37K

Publishing Venue

IBM

Related People

Miller, DL: AUTHOR [+2]

Abstract

This system of merging gas tracks provides for accepting two wafers, one each from two process boats, stacking them back-to-back and conveying them, in a stacked condition, to an output area. This is accomplished without undue sliding contact between the two facing surfaces of the wafers, other than wafer edge contact with the track system proper.

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System of Stacking Wafers

This system of merging gas tracks provides for accepting two wafers, one each from two process boats, stacking them back-to-back and conveying them, in a stacked condition, to an output area. This is accomplished without undue sliding contact between the two facing surfaces of the wafers, other than wafer edge contact with the track system proper.

The system consists of two input tracks 1 and 2 on which the wafers are placed, a merging section 3 and an output track 4 where the stacked wafers can be inserted into a boat for further processing. One input track is above the other (section A-a); both merging through radii such that they form the common output track 4.

The merging section 3 consists of two, opposite, closed conveying input directional gas tracks, a merging area, and a closed conveying output directional gas track which is common to both upper and lower tracks and perpendicular to them.

In operation, wafers are placed on the input platforms where they are conveyed, by supporting and propelling gas jets, to an area where the wafers are just overlapping, at which time, they are stopped by a projecting stop pin 5.

The attainment of positions 6 and 7 by both wafers is detected by two photodiodes 8 and 9. When the photodiodes detect the presence of both wafers, stop pin 5 is lowered. This allows the wafers to advance in the merging section until they contact a second stop pin 10 which again stops the wafers. The reason for the dual pins is to ensure the simultaneous progression of both wafers, without losing the overlapping condition which ensure...