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Browse Prior Art Database

Noncontact Test System

IP.com Disclosure Number: IPCOM000076886D
Original Publication Date: 1972-May-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 40K

Publishing Venue

IBM

Related People

Campbell, SH: AUTHOR [+4]

Abstract

The noncontact test system shown in the figure is computer controlled and used for testing and measuring the size of geometrical features and/or their locations of work pieces such as, for example, printed and integrated conductive circuit patterns and the like. This system obviates the requirement of visual inspection.

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Noncontact Test System

The noncontact test system shown in the figure is computer controlled and used for testing and measuring the size of geometrical features and/or their locations of work pieces such as, for example, printed and integrated conductive circuit patterns and the like. This system obviates the requirement of visual inspection.

Work piece W is illuminated by one or more of the appropriate illuminating sources 11, 12, 13. Lens 14 focuses the image of work piece W on a suitable image sensor 16. Image sensor 16 converts the image of the work piece to an electrical signal. Preferably, it is an image tube that provides an electrical output signal whose level is proportional to the illumination intensity of the point. Alternatively, image sensor 16 may be an image disector, vidicon or electron beam and associated particle detectors. A deflection amplifier 20 drives the x-y deflection coils, not shown, of image sensor 16. A focus supply 16A, which may be a fixed or programmable type, is connected to the focus coil, not shown, of image tube 16. The focus coil is used to control the spot focus of the tube beam.

Translator/rotator 21 is an image tube sweep modifier that compensates for rotation, magnification, translation, nonorthoganality and distortion of the image tube 16 during a calibration mode. During the system's normal operational mode, and prior to the inspection of a particular portion of the work piece, the system measures any misregistrations between the portion to be inspected and some reference or expected position. In response to general purpose central processing unit (CPU) 25, tran...