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Browse Prior Art Database

Wafer Carrier Conveyor

IP.com Disclosure Number: IPCOM000076922D
Original Publication Date: 1972-May-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 67K

Publishing Venue

IBM

Related People

Wagler, RJ: AUTHOR [+3]

Abstract

In moving wafer carriers, such as the carriers 10 illustrated in Fig. 1 from one processing station to another, breakage often occurs due to mishandling, resulting in high losses. As is conventional, the carrier includes a plurality of slots 11 into which may be loaded semiconductor wafers 12. As shown in phantom in Figs. 2 and 3, the rear edge 13 of the carrier 10 terminates in a depending lip 14, the lip extending below the lower surface 15 of the carrier 10. A conveyor 20, includes a hingeably mounted lift gate 21 which is coupled to the conveyor track by a strap hinge 22. The gate, including an upstanding leg 23, operates against the lower surface 15 of the carrier 10 to cock the carrier 10 and elevate the depending leg 14 of the carrier out of a groove 24, in which a moving belt 25 is positioned.

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Wafer Carrier Conveyor

In moving wafer carriers, such as the carriers 10 illustrated in Fig. 1 from one processing station to another, breakage often occurs due to mishandling, resulting in high losses. As is conventional, the carrier includes a plurality of slots 11 into which may be loaded semiconductor wafers 12. As shown in phantom in Figs. 2 and 3, the rear edge 13 of the carrier 10 terminates in a depending lip 14, the lip extending below the lower surface 15 of the carrier 10. A conveyor 20, includes a hingeably mounted lift gate 21 which is coupled to the conveyor track by a strap hinge 22. The gate, including an upstanding leg 23, operates against the lower surface 15 of the carrier 10 to cock the carrier 10 and elevate the depending leg 14 of the carrier out of a groove 24, in which a moving belt 25 is positioned. A piston 26, including a biasing spring 27, serves to elevate the gate 21 by a connecting rod 26A lifting the lip 14 off of the belt conveyor 25.

When it is desired to move the carrier along the conveyor, a gaseous medium is supplied to the upper surface of the piston 26 through conduit 27A,effecting a retraction of the piston 26 and permitting the gate 21 to be lowered. The lip 14 of the carrier comes into contact with the belt conveyor 25, thereby effecting longitudinal movement of the wafer carrier. A second track 28 may be provided on the upper surface of the gate 21 to minimize friction as the carrier is moving along the surface of the co...