Browse Prior Art Database

Evaporation Wafer Carrier

IP.com Disclosure Number: IPCOM000076932D
Original Publication Date: 1972-May-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 49K

Publishing Venue

IBM

Related People

Gunther, TA: AUTHOR [+2]

Abstract

A wafer carrier and evaporation tooling fixture which will permit the carrying of a wafer from an input station, through the evaporation process, to an output station without the handling of the individual wafers is illustrated in the drawing. The carrier 10 includes an annulus 11, having a central hub 12, which is connected to the annulus via three spokes, not shown, leaving a substantial open portion 13 intermediate the hub and the annulus. Rotatably mounted in the hub is a frustoconical driver 14, having an upper shaft portion 15 which projects through an aperture in the upper cover 16 of the annulus.

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Evaporation Wafer Carrier

A wafer carrier and evaporation tooling fixture which will permit the carrying of a wafer from an input station, through the evaporation process, to an output station without the handling of the individual wafers is illustrated in the drawing. The carrier 10 includes an annulus 11, having a central hub 12, which is connected to the annulus via three spokes, not shown, leaving a substantial open portion 13 intermediate the hub and the annulus. Rotatably mounted in the hub is a frustoconical driver 14, having an upper shaft portion 15 which projects through an aperture in the upper cover 16 of the annulus.

The annulus 11 includes an inwardly projecting rim portion 17, while the driver 14 includes a similar peripherally extending land portion 18. Intermediate the cover 16 and the rim and land 17 and 18, respectively, is mounted a plurality of individual wafer retaining members 19, each including a lip 20 which rests on the rim 17 and land 18 of the annulus and driver, and having a sloped outer wall 19A to coact with the driver 14 and the wall 11A. Each of the retaining members 19 includes an upstanding circumferentially extending wall 21, which engages the sloped wall of the driver 14 and the interior sloped wall 11A of the annulus
11. The cover may be held in place, as illustrated, by screws 16A and provides entrance to and egress from the carrier by the retaining members 19. Connected to the driver 14 and eccentrically positioned therein...