Browse Prior Art Database

Micromanipulator Liquid Contact Tester Probe

IP.com Disclosure Number: IPCOM000077245D
Original Publication Date: 1972-Jun-01
Included in the Prior Art Database: 2005-Feb-25
Document File: 2 page(s) / 30K

Publishing Venue

IBM

Related People

Koens, JG: AUTHOR

Abstract

This soft contact probe enables the user to test individual devices on a chip without destroying the device metallization.

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Micromanipulator Liquid Contact Tester Probe

This soft contact probe enables the user to test individual devices on a chip without destroying the device metallization.

The probe is lowered to a position just above the chip metallization 10 on semiconductor chip 11 to begin the testing operation. Sufficient air pressure is applied through line 12 to the piston 13, so as to compress conducting liquid 14 and force a liquid droplet (approximately 0.1 mil dia.) out of the probe nozzle. The droplet makes the contact with the chip surface. The conducting liquid may be, for example, mercury or salt water. Electrical current is passed through the electrical connecting cable 15, the metallic probe shell 16, and the droplet on to the chip metallization. When measurement is completed, the droplet is retracted through capillary action or can be dissolved with a small air blast. This liquid supply tube 17 contains a ceramic check valve 18 which eliminates parallel current paths.

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