Browse Prior Art Database

Wafer Holder

IP.com Disclosure Number: IPCOM000077246D
Original Publication Date: 1972-Jun-01
Included in the Prior Art Database: 2005-Feb-25
Document File: 2 page(s) / 63K

Publishing Venue

IBM

Related People

Leoff, A: AUTHOR [+2]

Abstract

A wafer holder is shown that has no moving parts, simple in construction, minimizes scratches and water chipping during processing, and helps increase product yield. It has the following advantages: (1) no moving parts to generate foreign particles, (2) wafer is held with controlled pressure, (3) no functional surface of wafer is contacted, and (4) maintains wafer orientation.

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Wafer Holder

A wafer holder is shown that has no moving parts, simple in construction, minimizes scratches and water chipping during processing, and helps increase product yield. It has the following advantages: (1) no moving parts to generate foreign particles, (2) wafer is held with controlled pressure, (3) no functional surface of wafer is contacted, and (4) maintains wafer orientation.

The wafer holder consists of an elastic member or members, a supporting rigid frame which also serves as a passage for air input to the elastic member, and an air supply controlled by the pressure regulator and an on/off solenoid valve. Several embodiments are shown in the drawing.

Fig. 1 shows elastic member tubing 2 pulled over a rigid steel member 4, which is hollow inside and provides air passage. A series of openings alternating 30 degrees up and down about the wafer plane provide wafer 6 hold, when pressure is applied to the elastic member via these openings. The tool is brought into wafer pickup position with the wafer plane lined with centerline of the ring, pressure is applied and elastic member 2 is inflated adjacent the openings. Thus, wafer 6 is captured from the wafer pedestal 7 by the inflated spots on the tubing. The force exerted on the wafer is controlled by input air pressure. A carrier arm 8 supports the apparatus. Tube 9 is the air input and exhaust means. A protective cover 10 may be used.

Fig. 2 shows an elastic molding 14 placed over a hollow channel 15 w...