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Browse Prior Art Database

Method for the Characterization of Phosphorus Silicate Glass

IP.com Disclosure Number: IPCOM000077631D
Original Publication Date: 1972-Aug-01
Included in the Prior Art Database: 2005-Feb-25
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Hoffmeister, W: AUTHOR [+4]

Abstract

For forming phosphorus silicate glass layers (PSG layers) in the manufacture of semiconductor components two procedural steps are required, viz., P-deposition and drive-in. When several wafers are processed simultaneously, both procedural steps have to be controlled in such a manner that the thickness of the PSG layer as well as its phosphorus contents remain within predetermined limits for all wafers. Should these factors be above or below the limits, in order to determine which of the two procedural steps is responsible for the deviation, the PSG layer is examined after the P-deposition.

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Method for the Characterization of Phosphorus Silicate Glass

For forming phosphorus silicate glass layers (PSG layers) in the manufacture of semiconductor components two procedural steps are required, viz., P-deposition and drive-in. When several wafers are processed simultaneously, both procedural steps have to be controlled in such a manner that the thickness of the PSG layer as well as its phosphorus contents remain within predetermined limits for all wafers. Should these factors be above or below the limits, in order to determine which of the two procedural steps is responsible for the deviation, the PSG layer is examined after the P-deposition.

This examination is based on a measuring of an X-ray fluorescence. The pulses measured on the wafers in constant intervals after the P-deposition process are a measure for the product mol percent P(2)O(5), multiplied with the thickness of the PSG layer. When the pulses are measured after the P-deposition process on different wafers distributed over a boat, by the X-ray fluorescence, a distribution of the deposited phosphorus over the boat is obtained.

Irregularities in the distribution show that this procedural step has not been executed in the manner wanted and that corresponding alterations have to take place.

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