Browse Prior Art Database

Composite Mask Fabrication

IP.com Disclosure Number: IPCOM000077649D
Original Publication Date: 1972-Sep-01
Included in the Prior Art Database: 2005-Feb-25
Document File: 2 page(s) / 51K

Publishing Venue

IBM

Related People

Crimi, JS: AUTHOR [+2]

Abstract

As metal masks become larger the problem of brazing the mask pattern to the support mesh increases.

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Composite Mask Fabrication

As metal masks become larger the problem of brazing the mask pattern to the support mesh increases.

One solution to the problem is to utilize a polyimide polymeric material bond 10, such as KAPTON* with metal 11 and 12 clad on either side of the organic bonding material. The metal 11 or 12 or both may be etched from both sides at the same time, after which the organic is removed from areas not masked with metal. Such an embodiment is illustrated in Figs. 1 and 2 wherein the metal 12 has been etched as at 13 to provide a passage there-through. Thereafter, the metal acts as its own mask while the organic bond 10 is removed as by, for example, a CO2 laser. If desired, the opposite side or plate 11 may be etched through so as to make a clear hole through the mask structure.

Alternatively, as illustrated in Figs. 4-7, metal plates 15 and 16 may be separately etched as at 17 and 18, respectively. The plates may then, as illustrated in Fig. 5, be bonded together at 19 by a polyimide polymeric material, and a further etch may then be made at 20 and 21 from opposite sides of the plates 15 and 16, respectively, so as to make a clear aperture or passage to the bonding material 19. Thereafter, as by a laser, etch, etc. the bond material 19 may be removed so as to give a clear passage through the composite mask (see Fig. 7). The latter method is particularly useful when it is desirable or preferable to etch each portion of the metal plates from both...