Browse Prior Art Database

Etchants for Iron Oxide Films

IP.com Disclosure Number: IPCOM000077670D
Original Publication Date: 1972-Sep-01
Included in the Prior Art Database: 2005-Feb-25
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Frieser, RG: AUTHOR [+3]

Abstract

A series of relatively noncorrosive etchant solutions provide uniform etching of thin films of ferric oxide used in forming semitransparent photoexposure masks.

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Etchants for Iron Oxide Films

A series of relatively noncorrosive etchant solutions provide uniform etching of thin films of ferric oxide used in forming semitransparent photoexposure masks.

The effective etchant solutions include various concentrations of FeCl(2), CuCl SnCl(2). and FeSo(4) in aqueous HCl. Typical solutions include: A

CuCl 10-20 grams

Conc HCl 18-36 cc

Water 100 cc

B

SnCl(2) 20-40 grams

Conc HCl 18-36 cc

Water 100 cc

C

FeSo(4).7H(2)O 30-60 grams

Conc HCl 18-36 cc

Water 100 cc

D

FeCL(2).4H(2)O 40-80 grams

Conc HCl 18-36 cc

Water 100 cc.

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