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Browse Prior Art Database

Site Selectable Pneumatic Wafer Check

IP.com Disclosure Number: IPCOM000077671D
Original Publication Date: 1972-Sep-01
Included in the Prior Art Database: 2005-Feb-25
Document File: 2 page(s) / 65K

Publishing Venue

IBM

Related People

Forslund, DC: AUTHOR

Abstract

A pneumatic wafer holding chuck employs a series of row and column vacuum paths, to permit the selective removal of chips from individual chip sites.

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Site Selectable Pneumatic Wafer Check

A pneumatic wafer holding chuck employs a series of row and column vacuum paths, to permit the selective removal of chips from individual chip sites.

Fig. 1 shows the gross system. This system with inputs from external data systems (card reader, memory, tape, etc.) and from an operator via a control panel (or automatic sequencing attached to the basic machine on which chuck 1 resides) provides chucking of wafer 2 and selective dechucking of individual chip sites 3.

Selective dechucking can occur at individual chip sites 3, on entire rows 5 or columns 6 or at selectable chip sites 3 in either rows or columns. The external data provides this selection information. The control panel provides the sequence timing.

Logic box 7 contains the logic (solid state or relays) designed in accordance with the combinatorial requirements of output drive to the pneumatic valves, as functions of the states of the two sets of inputs.

Solenoid valves 8 are considered on when addressing a pneumatic row 5 or column 6 with a control pressure and are considered off with a control vacuum. The intersection of an on row solenoid and an on column solenoid will cause vacuum to be removed from chip site 3. Likewise, if all row solenoids are on (or if any combination of row solenoids is on) and one column solenoid is on, then all chip sites in that column (or the selected combination of chip sites in that column) will have their vacuum removed. Energizing a...