Browse Prior Art Database

X Y Stage Drive

IP.com Disclosure Number: IPCOM000077672D
Original Publication Date: 1972-Sep-01
Included in the Prior Art Database: 2005-Feb-25
Document File: 2 page(s) / 46K

Publishing Venue

IBM

Related People

Kranik, JR: AUTHOR [+2]

Abstract

Motor driven "X-Y" positioning stages exhibiting high resolution while being capable of relatively high speeds and considerable travel, have a wide application in the integrated circuit industry. The high speed and length of travel may be obtained in a number of ways, usually by coupling to moving devices a course driver to move a stage to within a specified tolerance of a predetermined position at a high rate of speed, and then a second device to move the stage a limited and finite amount with high resolution.

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X Y Stage Drive

Motor driven "X-Y" positioning stages exhibiting high resolution while being capable of relatively high speeds and considerable travel, have a wide application in the integrated circuit industry. The high speed and length of travel may be obtained in a number of ways, usually by coupling to moving devices a course driver to move a stage to within a specified tolerance of a predetermined position at a high rate of speed, and then a second device to move the stage a limited and finite amount with high resolution.

In the drawing, a stage 10 is shown slideably coupled to a base 11 through a course driver 12 comprising a motor 13, which is connected either through a threaded shaft 14 or threadless (for example, Rohlix Actuator) lead screw. In this instance, the shaft includes threads 15 which engage a threaded nut 16 having mounted thereon a pair of parallel leaves 17A, 17B, which extend from the nut and are coupled through an enlarged body portion 18 by screws 18A to the stage
10. The body includes a leg 19 which is spaced from the second spring 17B, the leg 19 being bifurcated so as to form a clamp for engaging a cylindrical bushing 20 to which is connected a fine actuator 21. The actuator 21 includes a piezoelectric rod 22 which engages the body 18B connected to the nut 16. The rest position of the device is illustrated in solid lines in the drawing.

In operation, the stage is driven via the course driver 12 to the vicinity of the desired stage loca...