Browse Prior Art Database

Molded ATR Track

IP.com Disclosure Number: IPCOM000077903D
Original Publication Date: 1972-Oct-01
Included in the Prior Art Database: 2005-Feb-25
Document File: 2 page(s) / 38K

Publishing Venue

IBM

Related People

Halvarson, EH: AUTHOR

Abstract

This self-centering air track provides a convenient means to transport flat articles, such as semiconductor wafers, without physical contact between the track and the wafers.

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Molded ATR Track

This self-centering air track provides a convenient means to transport flat articles, such as semiconductor wafers, without physical contact between the track and the wafers.

Air track 10, shown in Fig. 1, provides in a single molded unit the required air entry ports 12 and 14 for directional movement of flat articles, as well as fluid exit, or air return, ports 18. The bottom surface of air track 10, not shown, includes fluid feed and return passages. The structure may be completed by attaching the molded sections to a flat bed plate, not shown. Fig. 2 shows a sectional view of a portion of air track 10 showing the shape of directional air ports 18. The entire functional section of air track 10 may be fabricated from molded plastic in a mold, including top and bottom sections 20 and 22, as shown in Fig. 3.

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