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Growing Epitaxial Films on a Continuous Line

IP.com Disclosure Number: IPCOM000077950D
Original Publication Date: 1972-Oct-01
Included in the Prior Art Database: 2005-Feb-25
Document File: 2 page(s) / 66K

Publishing Venue

IBM

Related People

Doo, VY: AUTHOR

Abstract

One of the problems generally recognized with liquid phase epitaxial fabrication techniques is that they are not easily suitable for mass production. An apparatus is here described which provides for such mass production techniques, by the use of tilting boats to carry substrates and the charging of each boat with molten material from a heated reservoir.

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Growing Epitaxial Films on a Continuous Line

One of the problems generally recognized with liquid phase epitaxial fabrication techniques is that they are not easily suitable for mass production. An apparatus is here described which provides for such mass production techniques, by the use of tilting boats to carry substrates and the charging of each boat with molten material from a heated reservoir.

An end section view of such apparatus is illustrated which is basically a furnace having a furnace tube extending to its interior. The furnace tube has a crucible for carrying a reservoir of the desired epitaxial source material, which is recharged by use of a pipe. The crucible has a lower opening which extends further into the furnace to feed the epitaxial source material into a tilting boat. The lower opening of the neck has a fitted control valve, which controls the flow of source material to the boat.

The illustrated portion of the apparatus represents that portion where the actual growth of the film takes place. The tilting boats, mounted on rails, are spaced and enter the opposite end of the furnace through swing open doors and gas lock apparatus. The furnace establishes the substrates, previously mounted on the boat, at a temperature of about 1000 degrees C. The source material is homogenized separately, prior to being fed into the crucible from the recharge pipe, and is maintained at approximately 1000 degrees C in the crucible.

When the boat is positioned und...