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Flared Washer Vacuum Pedestal

IP.com Disclosure Number: IPCOM000077976D
Original Publication Date: 1972-Oct-01
Included in the Prior Art Database: 2005-Feb-25
Document File: 2 page(s) / 41K

Publishing Venue

IBM

Related People

Appenzeller, HA: AUTHOR [+2]

Abstract

A series of vacuum pedestals fold and support a workpiece such as a semiconductor wafer. Each pedestal 1 has a vertical hollow shaft 2 with an angle groove 3 cut in its circumference which receives a flat rubber, neoprene washer 4. The angle of the groove and the depth of the groove determine the amount of flare given to washer 4. Workpiece 5 rests on washer 4. When vacuum is applied thru shaft 2, the washer 4 forms a seal Which is maintained as the workpiece 5 is pulled down against the top of shaft 2.

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Flared Washer Vacuum Pedestal

A series of vacuum pedestals fold and support a workpiece such as a semiconductor wafer. Each pedestal 1 has a vertical hollow shaft 2 with an angle groove 3 cut in its circumference which receives a flat rubber, neoprene washer
4. The angle of the groove and the depth of the groove determine the amount of flare given to washer 4. Workpiece 5 rests on washer 4. When vacuum is applied thru shaft 2, the washer 4 forms a seal Which is maintained as the workpiece 5 is pulled down against the top of shaft 2.

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