Browse Prior Art Database

Pneumatic Distribution and Control System

IP.com Disclosure Number: IPCOM000078063D
Original Publication Date: 1972-Nov-01
Included in the Prior Art Database: 2005-Feb-25
Document File: 2 page(s) / 65K

Publishing Venue

IBM

Related People

Castrucci, PP: AUTHOR

Abstract

The product control management system shown is useful in the manufacture of large-scale integrated circuits. The system utilizes a computer automated, pneumatic transport hardware to distribute and control the flow of semiconductor wafers through a manufacturing process environment. The system is designed for optimum product flow controlled via computer activation.

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Pneumatic Distribution and Control System

The product control management system shown is useful in the manufacture of large-scale integrated circuits. The system utilizes a computer automated, pneumatic transport hardware to distribute and control the flow of semiconductor wafers through a manufacturing process environment. The system is designed for optimum product flow controlled via computer activation.

The wafers are loaded into capsule cylinders which are directed between process sectors via pneumatic transport tubes. The outside of the cylinders are magnetic coated for recording product control information, like process directions and fabrication data. The work in process is maintained at a smooth flow utilizing novel rotating inventory storage units. Man intervention is maintained at a minimum level.

The system is assembled from a combination of the following pneumatic, mechanical and computer instruments: (1) Wafer Transport Capsule--WTC, (2) Product Initiator and Customizer Terminal -- PIC, (3) Inventory Storage Unit -- ISU, (4) Inventory Distribution Unit -- IDU, (5) Cache Storage Unit -- CSU, (6) Central Control Unit -- CCU., and (7) Product Flow and Control -- (PFC).

The system performs its control and management function in three main areas. These areas are: (1) Product Management, (2) Data Management, and
(3) Process Control and Direction. Typical options and features of these areas are shown below:

PRODUCT MANAGEMENT - (1) Wafer Starts, (2) Sector...