Browse Prior Art Database

Framing Chip Image for Step and Repeat Pattern

IP.com Disclosure Number: IPCOM000078250D
Original Publication Date: 1972-Dec-01
Included in the Prior Art Database: 2005-Feb-25
Document File: 2 page(s) / 62K

Publishing Venue

IBM

Related People

Gogos, B: AUTHOR [+2]

Abstract

An opaque border or frame may be automatically added to a single segment positive chip image design, employed in a step and repeat process for generating a lithographic mask. The frame prevents double exposure of adjacent chip image sites as a single segment image is stepped and repeated in generating the mask.

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Framing Chip Image for Step and Repeat Pattern

An opaque border or frame may be automatically added to a single segment positive chip image design, employed in a step and repeat process for generating a lithographic mask. The frame prevents double exposure of adjacent chip image sites as a single segment image is stepped and repeated in generating the mask.

Shape data for a chip image 10, a kerf region 12 abutting the image and an encompassing frame 14, shown in Fig. 1, may be expressed in a graphical language (CL/1) comprising a series of operational codes definitive of various operations, in assembling a series of shapes descriptive of an overall pattern. An art work generator, typically a Mann 1600 camera, responds to the operational codes and generates the shapes at the locations specified by the codes. One set of codes 16, shown in Fig. 2A, defines the overall pattern or prime cell. Another set of codes 18, shown in Fig. 2B, defines standard cells or segments in the overall pattern or prime cell. Another set of codes 20, shown in Fig. 2C, is linked to each standard cell and specifies various geometrical shapes i.e., rectangles, circles, polygons at a location and a size selected by a designer. Another set of codes 22, shown in Fig. 2D, translates the various standard cells and shape cells as required to assemble the prime cell.

A graphical message 24, shown in Fig. 3, defines shapes 10, 12 and 14 by unique prime cells, standard cells, shape cells and transla...