Browse Prior Art Database

Air Track Control System

IP.com Disclosure Number: IPCOM000078261D
Original Publication Date: 1972-Dec-01
Included in the Prior Art Database: 2005-Feb-25
Document File: 2 page(s) / 26K

Publishing Venue

IBM

Related People

Bertelsen, BI: AUTHOR

Abstract

This air track control system provides for intermittent control of the movement of objects, such as semiconductor wafers, through a delay buffer or a dependent process environment.

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Air Track Control System

This air track control system provides for intermittent control of the movement of objects, such as semiconductor wafers, through a delay buffer or a dependent process environment.

Schematically shown is a section of air track of any tyoical configuration containing a series of vacuum ports, alternatingly connected to one of two separately controlled vacuum lines by solenoid valves 1 and 2. The system, utilizing six vacuum stops, operates as follows. With solenoid valve 1 open and valve 2 closed, a first wafer is fed to the system and held by vacuum stop 1. After one sixth of the required delay time, solenoid valve 1 is closed and valve 2 is opened allowing the first wafer to move to vacuum stop 2. After another one sixth of the required delay time the conditions of solenoid valves 1 and 2 are reversed, and a second wafer is fed to vacuum stop 1 as the first wafer moves to vacuum stop 3. The sequence is repeated, feeding wafers at a rate of one third the required delay time.

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