Browse Prior Art Database

Laser Via Punching of Ceramic Green Sheet

IP.com Disclosure Number: IPCOM000078383D
Original Publication Date: 1972-Dec-01
Included in the Prior Art Database: 2005-Feb-25
Document File: 2 page(s) / 40K

Publishing Venue

IBM

Related People

Griesemer, JA: AUTHOR [+3]

Abstract

Spacing between mask 1 and sheet 2 during punching of via holes 3 by a laser 4 results in various problems. The problems are corrected by providing a multiple hole air nozzle 5 for keeping mask 1 against sheet 2 and a through hole (machined by laser) flexible support stand 6, which allows clearance for debris purging. The flexibility of the stand 6 provides a diaphragm effect for assuring mask-to-sheet contact by controlled air pressure. The support stand provides an easy and cheap means for reproducing any pattern within a package, by simple prescanning the desired pattern by the laser before the start of part processing.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 2

Laser Via Punching of Ceramic Green Sheet

Spacing between mask 1 and sheet 2 during punching of via holes 3 by a laser 4 results in various problems. The problems are corrected by providing a multiple hole air nozzle 5 for keeping mask 1 against sheet 2 and a through hole (machined by laser) flexible support stand 6, which allows clearance for debris purging. The flexibility of the stand 6 provides a diaphragm effect for assuring mask-to-sheet contact by controlled air pressure. The support stand provides an easy and cheap means for reproducing any pattern within a package, by simple prescanning the desired pattern by the laser before the start of part processing.

Reverse side beam scanning of the mask (2 steps) from top and bottom has provided the best quality and reproducibility of laser via making to date. This technique offers lower power usage (<50 Watts) with little or no chance for burning effects and mask heat distortion. The resulting hole pattern conforms to an hour-glass configuration with slight converging of angle intersecting in the center, leaving the larger diameter openings at top and bottom.

1

Page 2 of 2

2

[This page contains 2 pictures or other non-text objects]