Browse Prior Art Database

Chuck and Chuck Lock Mechanism

IP.com Disclosure Number: IPCOM000078384D
Original Publication Date: 1972-Dec-01
Included in the Prior Art Database: 2005-Feb-25
Document File: 2 page(s) / 44K

Publishing Venue

IBM

Related People

Kostenko, A: AUTHOR [+2]

Abstract

In testing silicon wafers, very accurate and repeatable locating of the wafer is required. The combination of this chuck and chuck-lock mechanism performs this task. Wafer 1 is placed on vacuum pedestal 2 which is an integral part of vacuum chuck 3. Vacuum chuck 3 has slot 4, which serves as a guide when placed on chuck pedestal 5 and guide pins 6 of the locking mechanism 7. Then locking arm 8, actuated by air cylinder 9, and going through rack 10 and pinion 11 provides the external force to Position and lock the chuck with the wafer. Design of the chuck is such that in the locking operation, the force application point 12 distributes the forces in such a way that in addition to X-Y forces, a "Z" component for downward locking is attained.

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Chuck and Chuck Lock Mechanism

In testing silicon wafers, very accurate and repeatable locating of the wafer is required. The combination of this chuck and chuck-lock mechanism performs this task. Wafer 1 is placed on vacuum pedestal 2 which is an integral part of vacuum chuck 3. Vacuum chuck 3 has slot 4, which serves as a guide when placed on chuck pedestal 5 and guide pins 6 of the locking mechanism 7. Then locking arm 8, actuated by air cylinder 9, and going through rack 10 and pinion 11 provides the external force to Position and lock the chuck with the wafer. Design of the chuck is such that in the locking operation, the force application point 12 distributes the forces in such a way that in addition to X-Y forces, a "Z" component for downward locking is attained. A generous clearance over pins 6 is used in slot 4 rather than dependency upon a tight fit of the slot.

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