Browse Prior Art Database

Microprinter for Wafer or Chip Identification

IP.com Disclosure Number: IPCOM000078529D
Original Publication Date: 1973-Jan-01
Included in the Prior Art Database: 2005-Feb-26
Document File: 2 page(s) / 46K

Publishing Venue

IBM

Related People

Schaedlich, OA: AUTHOR

Abstract

A system is schematically shown for producing identification marks on a semiconductor wafer 10 or individual chips thereof. The marks are formed as an array of small indentations to depict alphanumeric characters. A laser beam is utilized as the power source, and printing is accomplished by expanding the laser beam to full field through a beam expanding lens system 11. A collimating lens system 12 allows selective rays to pass through a digital shutter assembly 13, bringing the emerging rays to focus on the wafer as, for example, through a converging lens system 14. Control of the digital shutter assembly is with a keyboard such as the alphanumeric keyboard 15 or a computer, which controls digital shutter solenoid logic to move shutters in and out of the path of the expanded beam.

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Microprinter for Wafer or Chip Identification

A system is schematically shown for producing identification marks on a semiconductor wafer 10 or individual chips thereof. The marks are formed as an array of small indentations to depict alphanumeric characters. A laser beam is utilized as the power source, and printing is accomplished by expanding the laser beam to full field through a beam expanding lens system 11. A collimating lens system 12 allows selective rays to pass through a digital shutter assembly 13, bringing the emerging rays to focus on the wafer as, for example, through a converging lens system 14. Control of the digital shutter assembly is with a keyboard such as the alphanumeric keyboard 15 or a computer, which controls digital shutter solenoid logic to move shutters in and out of the path of the expanded beam. Additionally, the keyboard or computer may actuate, through conventional logic, the carriage actuator system driving the wafer pedestal 16 in both the X, Y and theta modes. In a like manner, depression of the keyboard or of an output from the computer can be utilized to trigger, as through a one-shot trigger, the laser.

It should be recognized that viewing optics may be applied to permit viewing, such as illustrated schematically in the drawing.

The system lends itself to high speed and automation as desired. The marks made on the wafer are permanent and will withstand the high temperatures and etching conditions encountered during conventio...