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Plate Separation Technique for Control Printing

IP.com Disclosure Number: IPCOM000078533D
Original Publication Date: 1973-Jan-01
Included in the Prior Art Database: 2005-Feb-26
Document File: 2 page(s) / 28K

Publishing Venue

IBM

Related People

Giuffre, GJ: AUTHOR [+3]

Abstract

In contact printing chrome master masks to chrome copy masks, an intimate contact of plates is needed to resolve fine geometries. In addition, in order to maintain overall dimensions within fine tolerances, little or no plate bending is permissible. Two problems arise with these requirements. The better the contact the more difficult it becomes to separate the plates after exposure. This difficulty results in chronic problems known as "resist lift-off" and master and copy plate scratching. A trade off in pressure in squeezing the plates together is made, resulting in the second problem known as "overall dimension shift".

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Plate Separation Technique for Control Printing

In contact printing chrome master masks to chrome copy masks, an intimate contact of plates is needed to resolve fine geometries. In addition, in order to maintain overall dimensions within fine tolerances, little or no plate bending is permissible. Two problems arise with these requirements. The better the contact the more difficult it becomes to separate the plates after exposure. This difficulty results in chronic problems known as "resist lift-off" and master and copy plate scratching. A trade off in pressure in squeezing the plates together is made, resulting in the second problem known as "overall dimension shift".

These problems are eliminated without adding additional distortion (overalls) or image (diffraction) problems. Prior to contact printing, tab 2 of 1 mil thick self- adhesive MYLAR* polyester tape is attached to one corner of chrome master plate 3. Tab 2 is approximately 1/8 x 3/8 inch and is placed approximately 1/2 inch beyond the array 4 of chips on the master. (No chip positions, nomenclature 5 or patterns 6 are covered by the tab.) The copy plate 3 is prepared with resist in the normal manner. The contact printing operation proceeds normally. The glass master and copy plates which are ductile materials contact each other intimately over the array portion of plate 3, but are held apart over the tab portion. No distortions or diffraction problems are caused by tab 2. However, upon release of press...