Dismiss
InnovationQ will be updated on Sunday, Oct. 22, from 10am ET - noon. You may experience brief service interruptions during that time.
Browse Prior Art Database

Preparation of Sapphire Surfaces for Epitaxy

IP.com Disclosure Number: IPCOM000078556D
Original Publication Date: 1973-Jan-01
Included in the Prior Art Database: 2005-Feb-26
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Mendel, E: AUTHOR [+2]

Abstract

A mechanochemical polishing procedure is described to prepare featureless, strain-free sapphire surfaces suitable for epitaxy.

This text was extracted from a PDF file.
This is the abbreviated version, containing approximately 57% of the total text.

Page 1 of 1

Preparation of Sapphire Surfaces for Epitaxy

A mechanochemical polishing procedure is described to prepare featureless, strain-free sapphire surfaces suitable for epitaxy.

Substrate preparation has been increasingly recognized as a paramount step in the fabrication of epitaxial semiconductor device structure; e.g. G. A. Rozgony et al, J. Appl. Phys. 43, 1186, 1972. Sapphire and spinel have been employed extensively as substrates for the epitaxial growth of a variety of materials; e.g., A. Reisman et al, J. Electrochem. Soc., 118, 1653, 1971. Wafers of sapphire and silicon are usually available in the mechanically finished form and require a variety of liquid and gas-phase treatments, to remove the damage introduced during the mechanical polishing stage. The noted approaches do not eliminate completely the residual damage originating from the shaping operation. A chemical polishing method has been recently outlined which appears to be satisfactory for some orientations of sapphire and spinel: Jr. Electrochem. Soc., 118, 1653, (1971).

A method is described for preparing surfaces of sapphire and spinel that is applicable to all orientations. This method yields surfaces that are of excellent topographical quality, and are suitable for growing epitaxial layers with minimum of defects at the substrate epitaxy interface. The details of the polishing method will now be described with respect to sapphire. Spinels behave very similarly to sapphire with respect to polishing...