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Impedance Terminator for AC Testing Monolithic Chips

IP.com Disclosure Number: IPCOM000078574D
Original Publication Date: 1973-Feb-01
Included in the Prior Art Database: 2005-Feb-26
Document File: 2 page(s) / 39K

Publishing Venue

IBM

Related People

Bove, R: AUTHOR [+3]

Abstract

In the testing of integrated circuits, it may be necessary to have terminal impedances or loads at the circuit terminals which are unnecessary in the functional integrated circuits. For example, in AC testing of integrated circuit chips, the proper terminal impedance is essential.

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Impedance Terminator for AC Testing Monolithic Chips

In the testing of integrated circuits, it may be necessary to have terminal impedances or loads at the circuit terminals which are unnecessary in the functional integrated circuits. For example, in AC testing of integrated circuit chips, the proper terminal impedance is essential.

One conventional way that the problem of terminal loads has been handled was to have in the tester, a plurality of load resistances which could be applied to the terminal during testing. In other words, these load resistors would be located off the integrated circuit chip.

In the present structure, as shown in Fig. 1, the appropriate terminal resistances are formed in the chip kerf 10, the area between integrated circuit chips on a wafer which is cut away when the wafer is diced into chips. Each chip 11 contains a diffused isolation wall 12 and a plurality of peripheral pads or terminals 13, which are connected to the appropriate internal circuitry. In this instance, the terminals are connected by metallization layers 14 to appropriate terminal resistors 15 which, in turn, are connected to an appropriate voltage source. During the testing when the terminals 13 are being exercised, resistors 15 provide the appropriate AC or DC terminal loads. When testing is completed and the kerf is destroyed during wafer dicing, the resistors 15 are eliminated from the circuit.

In accordance with another arrangement, as shown in Fig. 2, where there i...