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Etchant & Solvent for Cured Polyimides

IP.com Disclosure Number: IPCOM000078649D
Original Publication Date: 1973-Feb-01
Included in the Prior Art Database: 2005-Feb-26
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Loukianoff, MA: AUTHOR

Abstract

Cured polyimides can be dissolved in a 98% solution of ethylenediamine. Other amine homologues like diethylene-trimine and triethylenetetramine are also solvents for the cured polyimides. The first discussed ethylene-diamine does not attack to any appreciable degree cured photoresists such as KTFR*. Thus cured photoresists may be used to mask the cured polyimides for etching of the polyimides into desired patterns. * Trademark of Eastman Kodak Company.

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Etchant & Solvent for Cured Polyimides

Cured polyimides can be dissolved in a 98% solution of ethylenediamine. Other amine homologues like diethylene-trimine and triethylenetetramine are also solvents for the cured polyimides. The first discussed ethylene-diamine does not attack to any appreciable degree cured photoresists such as KTFR*. Thus cured photoresists may be used to mask the cured polyimides for etching of the polyimides into desired patterns. * Trademark of Eastman Kodak Company.

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