Browse Prior Art Database

Photomask Input/Output System

IP.com Disclosure Number: IPCOM000078781D
Original Publication Date: 1973-Mar-01
Included in the Prior Art Database: 2005-Feb-26
Document File: 2 page(s) / 55K

Publishing Venue

IBM

Related People

Collins, JF: AUTHOR [+4]

Abstract

The system provides a storage facility for glass photomasks 10, such that they may be automatically retrieved and delivered to an exposure station by means of computer control. The masks 10 are located in sealed cartridges 12 to avoid contamination by airborne dust particles. Each cartridge 12 incorporates a sliding door cover 14 which acts as a dust seal when closed, but permits access for loading or removal of the mask. The mask 10 does not come in contact with the cartridge 12 but moves in or out with a "U" shaped slide 16. The slide 16 comes in contact with an ejector spring 18 and a latch mechanism 20. The ejector spring 18 is deflected and the latch engaged when the slide 16 is inserted into the cartridge 12.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 52% of the total text.

Page 1 of 2

Photomask Input/Output System

The system provides a storage facility for glass photomasks 10, such that they may be automatically retrieved and delivered to an exposure station by means of computer control. The masks 10 are located in sealed cartridges 12 to avoid contamination by airborne dust particles. Each cartridge 12 incorporates a sliding door cover 14 which acts as a dust seal when closed, but permits access for loading or removal of the mask. The mask 10 does not come in contact with the cartridge 12 but moves in or out with a "U" shaped slide 16. The slide 16 comes in contact with an ejector spring 18 and a latch mechanism 20. The ejector spring 18 is deflected and the latch engaged when the slide 16 is inserted into the cartridge 12.

A two-stage unit is utilized which contains a column of 50 cartridges 12 and provides for individual mask selection under computer control. The section containing the 50 cartridges is the storage area 22 which has adjacent thereto the elevator section 24, as shown in Fig. 2. When the cartridge 12 is inserted in the storage area 22, the sliding door 14 is opened to permit horizontal movement of the mask slide 16 from the storage position 22 to the elevator section 24. The slide 16 is ejected when the spring loaded latch 20 within the cartridge 12 is released, by energizing the appropriate solenoid 26 within the storage section 22. This causes the slide 16 to move into the path of a roller assembly 28, which transports the slide 16 into the correct position within the elevator section...