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Optimizing Electrode Systems

IP.com Disclosure Number: IPCOM000078791D
Original Publication Date: 1973-Mar-01
Included in the Prior Art Database: 2005-Feb-26
Document File: 2 page(s) / 40K

Publishing Venue

IBM

Related People

Engelke, H: AUTHOR

Abstract

A method of optimizing electrode systems is described, by means of which the formation of current/voltage characteristics of electrodes is quantitatively explained as a function of their geometry and secondary emission properties. The method utilizes raster electron microscopic means for recording the test current image in the deflection mode.

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Optimizing Electrode Systems

A method of optimizing electrode systems is described, by means of which the formation of current/voltage characteristics of electrodes is quantitatively explained as a function of their geometry and secondary emission properties. The method utilizes raster electron microscopic means for recording the test current image in the deflection mode.

With many electron-beam applications, electrode systems hit by electrons play an important part. Depending upon the respective application, an electrode system must have particular current/voltage characteristics. For optimizing such electrode systems, test current images of one or several electrodes are recorded in a raster electron microscope in the deflection mode. The test current images provide quantitative means for measuring the electron current absorbed by an electrode, as a function of the point of incidence of the primary electrons. This information permits drawing conclusions as to secondary electron trajectories emanating from a point of incidence, the secondary electron yields of the electrode just measured, and the current/voltage characteristics for expanded cross section primary beams.

The figure shows a three-electrode system consisting of two aperture electrodes 1 and 2 and a target plate 3. It is to be examined under which conditions target 3 emits the greatest possible number of secondary electrons. To this end; electron current I absorbed by target 3 is determined in the def...