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Browse Prior Art Database

Image Positioning

IP.com Disclosure Number: IPCOM000078849D
Original Publication Date: 1973-Mar-01
Included in the Prior Art Database: 2005-Feb-26
Document File: 2 page(s) / 40K

Publishing Venue

IBM

Related People

Newcomb, DA: AUTHOR [+3]

Abstract

Accurate positioning of an image may be critical, for example, in the production of high-tolerance parts by photolithography. Accuracy to within + 0.00005 inch is obtained by providing a substrate having two accurately prepared datum surfaces. For example, as shown, the datum s surfaces may represent a horizontal and a vertical edge of a rectangular substrate. The art work to be projected on the substrate is prepared so as to include alignment marks positioned to line up on the datum surfaces of the substrate. Then, during production of the image, the alignment marks are projected to align with the datum surfaces of the substrate, thus resulting in accurate positioning of the image.

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Image Positioning

Accurate positioning of an image may be critical, for example, in the production of high-tolerance parts by photolithography. Accuracy to within + 0.00005 inch is obtained by providing a substrate having two accurately prepared datum surfaces. For example, as shown, the datum s surfaces may represent a horizontal and a vertical edge of a rectangular substrate. The art work to be projected on the substrate is prepared so as to include alignment marks positioned to line up on the datum surfaces of the substrate. Then, during production of the image, the alignment marks are projected to align with the datum surfaces of the substrate, thus resulting in accurate positioning of the image.

In addition to giving high accuracy in image positioning, this technique also saves wasted area on substrates now set aside for alignment marks. The area saved could be used for additional circuitry.

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