Browse Prior Art Database

Homogeneous Heating of Substrates to be Metallized

IP.com Disclosure Number: IPCOM000078880D
Original Publication Date: 1973-Mar-01
Included in the Prior Art Database: 2005-Feb-26
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Hasenbein, W: AUTHOR [+3]

Abstract

It is common practice to put substrates to be metallized upside down in an evaporation dome, to weight them with a quartz disc, and to heat them through the quartz disc by radiation emanating from heated filaments. The inhomogeneous heating of the substrates obtained by this method can be avoided by depositing a thin layer of heat-conductive material, such as copper or chromium, on the quartz disc surface which has no contact with the substrate.

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Homogeneous Heating of Substrates to be Metallized

It is common practice to put substrates to be metallized upside down in an evaporation dome, to weight them with a quartz disc, and to heat them through the quartz disc by radiation emanating from heated filaments. The inhomogeneous heating of the substrates obtained by this method can be avoided by depositing a thin layer of heat-conductive material, such as copper or chromium, on the quartz disc surface which has no contact with the substrate.

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