Browse Prior Art Database

Spiral Scan Image Detector and Comparator

IP.com Disclosure Number: IPCOM000078970D
Original Publication Date: 1973-Apr-01
Included in the Prior Art Database: 2005-Feb-26
Document File: 2 page(s) / 37K

Publishing Venue

IBM

Related People

Culver, JV: AUTHOR [+4]

Abstract

The apparatus of the drawing inspects circuit wiring patterns formed on substrates 2. The substrates are mounted on a circular table 3 that is mounted on a shaft 4 and rotated by a motor 5. An optical sensor 6 receives light reflected from a substrate 2 and produces an electrical signal on a line 7, that corresponds to the optical scan of the wiring pattern. Optical sensor 6 is moveable parallel to a radius of table 3 to spirally scan substrates 2 as table 3 rotates. Thus, the waveform on line 7 signifies the presence or absence of a conductor on substrate 2 along the line that is scanned.

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Spiral Scan Image Detector and Comparator

The apparatus of the drawing inspects circuit wiring patterns formed on substrates 2. The substrates are mounted on a circular table 3 that is mounted on a shaft 4 and rotated by a motor 5. An optical sensor 6 receives light reflected from a substrate 2 and produces an electrical signal on a line 7, that corresponds to the optical scan of the wiring pattern. Optical sensor 6 is moveable parallel to a radius of table 3 to spirally scan substrates 2 as table 3 rotates. Thus, the waveform on line 7 signifies the presence or absence of a conductor on substrate 2 along the line that is scanned.

A magnetic recording disk 9 is mounted on shaft 4 to rotate with table 3. Substrates with known good wiring patterns are mounted on table 3 and the signal on line 7 is applied to a read-write head 12, to magnetically record the image of the wiring pattern that is known to be good. Substrates to be tested are then mounted on table 3, and the signal on line 7 is compared with a signal on a line 13 that is read from the previous recording on magnetic disk 9. A compare circuit 14 compares the signal on line 7, which represents the wiring pattern of a substrate being tested, with the signal on line 13 and produces an error signal if the substrate being tested differs from the known good substrate.

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