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Self Pressurized Container with Pressure Clamp

IP.com Disclosure Number: IPCOM000079023D
Original Publication Date: 1973-Apr-01
Included in the Prior Art Database: 2005-Feb-26
Document File: 2 page(s) / 39K

Publishing Venue

IBM

Related People

Pinckney, WJ: AUTHOR [+2]

Abstract

This container is especially useful for the storage and transport of a semiconductor wafer in a particle free, noncontaminating atmosphere.

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Self Pressurized Container with Pressure Clamp

This container is especially useful for the storage and transport of a semiconductor wafer in a particle free, noncontaminating atmosphere.

The device consists of two main parts: base 1 and cover 2. Base 1 is cylindrical in shape and has a groove on its outer diameter for 0-ring seal 3. The base also has raised pedestal 4 on its top surface which contains 0-ring seal 5. Wafer 7 is placed on pedestal 4 with its backside in contact with seal 5. Wafer 7 is loaded in a clean area (class 100 or better) using a vacuum pickup from the backside. Vent hole 8 under the wafer vents to the atmosphere.

Cover 2 is also cylindrical in shape and its inner diameter is machined so that it makes a leakproof seal with 0-ring 3. Cover 2 is positioned over base 1 and pushed down until it can be locked into place by springs 9. The cover is put on in a clean area (class 100 or better).

By pushing the cover down and locking it in place, the pressure of the clean air entrapped under cover 2 is increased to approximately 15 psi gage. This holds wafer 7 to base 1 and prevents it from moving during transportation. The seal, being leakproof, also allows the wafer to be stored for extended periods and transported in a contamination free atmosphere. The high pressure keeps dirt and contamination from entering the container.

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