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Browse Prior Art Database

Wafer Stepper Head Assembly

IP.com Disclosure Number: IPCOM000079041D
Original Publication Date: 1973-Apr-01
Included in the Prior Art Database: 2005-Feb-26
Document File: 2 page(s) / 41K

Publishing Venue

IBM

Related People

Moro, RD: AUTHOR [+4]

Abstract

This is a gimbal type contactor fixturing scheme for on-line microadjustments of contactor to product, with sufficient rigidity to maintain performance.

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Wafer Stepper Head Assembly

This is a gimbal type contactor fixturing scheme for on-line microadjustments of contactor to product, with sufficient rigidity to maintain performance.

The corrective adjustments provided are for planarization about the "X" and "Y" axis, rotation about the "z" axis and linear deflection along the Z axis. On-line adjustments permit immediate corrections to contacting problems.

The fixturing scheme is a series of adjustment functions beginning at the machine base.
1. Planarization about Y axis: Use centerline 1 as pivot and

adjustable stop 2.
2. Planarization about X axis: Uses centerline 3 as pivot and

adjustable step 4 with spring loading 5 against pivot.
3. Rotation correction about Z axis: Uses Z axis as center of

rotation with pin and fork adjustment scheme 6.
4. Linear adjustment (deflection) along Z axis: Uses a

micrometer nut 7 to lower contactor against wafer.

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