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Sealing Porous Glass Films

IP.com Disclosure Number: IPCOM000079230D
Original Publication Date: 1973-Jun-01
Included in the Prior Art Database: 2005-Feb-26
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Esch, RP: AUTHOR [+2]

Abstract

This method involves sealing porous glass, by chemically reacting the hydroxyl groups on the surface of the glass with suitable chemical compounds.

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Sealing Porous Glass Films

This method involves sealing porous glass, by chemically reacting the hydroxyl groups on the surface of the glass with suitable chemical compounds.

Chemically vapor deposited glasses and pyrolytic oxides, particularly glass films applied at relatively low temperatures, are somewhat porous. These pores are generally lined with hydroxyl groups which absorb water readily.

In this process, the water is driven out of the pores and replaced with a substance which reacts with the hydroxyl groups filling the pores, thus preventing refilling with water. The water can be driven out quite conveniently by heating at temperatures greater than 200 degrees C in a dry ambient. The actual times and temperatures will depend on the porosity and thickness of the films. This treatment can be used to fill the pores on a permanent basis, or alternately to cut down on the back-diffusion of water at room temperatures for sufficiently long times, to permit hermetic sealing.

The following chemicals and techniques are suggested for filling the glass pores. 1) Alcohols which react with silanol groups provided with an alkyl

portion to fill the pore or pathway to the pore,

2) Compounds which can be vaporized at elevated temperatures to

penetrate the pores, but at reduced temperatures will be

condensed in the pores,

3) An insitu polymerization reaction in the film, which could be

produced by a thin porous catalyst deposited previously on

the surface of the film, and

4...