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Cleaning Insulating Films

IP.com Disclosure Number: IPCOM000079251D
Original Publication Date: 1973-Jun-01
Included in the Prior Art Database: 2005-Feb-26
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Pillus, CA: AUTHOR

Abstract

It is known that mobile ions, e.g., sodium, may be moved to the surface of an insulating film such as SiO(2) by subjecting the film to voltage potential. This method does not remove the ions from the film.

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Cleaning Insulating Films

It is known that mobile ions, e.g., sodium, may be moved to the surface of an insulating film such as SiO(2) by subjecting the film to voltage potential. This method does not remove the ions from the film.

A method for removing mobile ions from a film is accomplished, by placing a substrate having an insulating film in an electrolyte solution and passing a current through the substrate and solution. Mobile ions drift to the electrode of opposite polarity and leave the film. If the electrolyte is HCl and the mobile ions are sodium, the mobile sodium combines with chlorine and remains in solution.

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