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Crucible Liner for Electron Beam High Evaporation Rate Source

IP.com Disclosure Number: IPCOM000079763D
Original Publication Date: 1973-Sep-01
Included in the Prior Art Database: 2005-Feb-26
Document File: 2 page(s) / 31K

Publishing Venue

IBM

Related People

Dankelman, JJ: AUTHOR [+3]

Abstract

The drawing shows in section a ceramic crucible 2 and a metal liner 3 that hold a material which is to be evaporated by electron bombardment. Tubes 4 in the crucible circulate cooling water.

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Crucible Liner for Electron Beam High Evaporation Rate Source

The drawing shows in section a ceramic crucible 2 and a metal liner 3 that hold a material which is to be evaporated by electron bombardment. Tubes 4 in the crucible circulate cooling water.

The bottom wall of crucible liner 3 rests on crucible 2 and heat flows from the liner to the crucible. The side walls of the liner 3 are spaced inwardly from the side walls of the crucible so that heat flows from the side walls of the liner to the crucible by radiation, but not by conduction.

In the conventional construction, the liner side walls are maintained in close contact with the crucible and conduction cooling occurs on all the outer surfaces of the liner. It has been found that the liners warp and thus maintain heat conductive contact only at various points along the side walls, so that uneven cooling appears at these points of contact.

In the crucible of the drawing, the side walls are isolated from the uneven conductive cooling and the radiation cooling is uniform, without regard to any change in shape in the liner. The bottom wall of the liner, which is in contact with the water-cooled crucible, is sufficiently far from the surface of the material where evaporation takes place that it does not adversely effect the temperature distribution of the evaporating material. Thus, the apparatus provides improved evaporation for applications such as forming conductive paths on circuit devices.

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