Browse Prior Art Database

Wafer Carrier/Buffer

IP.com Disclosure Number: IPCOM000079896D
Original Publication Date: 1973-Sep-01
Included in the Prior Art Database: 2005-Feb-26
Document File: 2 page(s) / 46K

Publishing Venue

IBM

Related People

Buchmann, A: AUTHOR [+4]

Abstract

This is a portable as well as stationary wafer carrier/buffer for transporting semiconductor wafers without "jiggle", damage, or danger of fall out, regardless of carrier position.

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Wafer Carrier/Buffer

This is a portable as well as stationary wafer carrier/buffer for transporting semiconductor wafers without "jiggle", damage, or danger of fall out, regardless of carrier position.

It is known to transport semiconductor wafers in wafer boats which have a slot for each wafer. These wafers are free to jiggle, crack, chip, or fall out of the carrier. This jiggling of wafers produces silicon particles which are detrimental to maintaining a contamination free environment.

Referring to the figures, the illustrated cartridge J is placed on its back surface E. By rotating knobs A, camshafts B journaled in housings G and H push springs C out of the way for a wafer input.

Once a desired number of wafers have been loaded, springs C are released by turning knobs A. At this point, springs C apply a force on the wafers in such a manner as to force them against back surface
E. The springs each have a twist at the tips which also generates force F3 holding the wafer down against the projecting ribs of sides
D. The sum of forces F1 and F2 is F3 which is enough force to move the wafers against the back surface E and prevent the wafers from moving.

With all wafers in place, cover F is inserted and the wafer carrier can be moved, turned upside down or on its side and wafers will not jiggle in the carrier. At no time is the wafer touched on the top surface, only the sides and bottom of the wafer make contact to any surface.

When the carrier is loaded into a wafer...