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X Ray Sensitive Resists

IP.com Disclosure Number: IPCOM000079910D
Original Publication Date: 1973-Sep-01
Included in the Prior Art Database: 2005-Feb-26
Document File: 2 page(s) / 30K

Publishing Venue

IBM

Related People

Feder, R: AUTHOR [+2]

Abstract

An x-ray sensitive system incorporates an x-ray absorbing species, an efficient energy transfer mechanism, and a chemical system which can be effectively modified by the transferred energy. Selection of x-ray absorbing species:

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X Ray Sensitive Resists

An x-ray sensitive system incorporates an x-ray absorbing species, an efficient energy transfer mechanism, and a chemical system which can be effectively modified by the transferred energy. Selection of x-ray absorbing species:

For maximum absorption, it is necessary for the incident radiation energy to be slightly greater than the energy of the absorption edge of the absorbing material, that is, the wavelength of the incident radiation must be slightly shorter than the wavelength of maximum absorption of the absorbing species. This is shown in the graph.

Since K emission lines are always more intense than any others, these can be considered the only lines in the incident radiation of significance. Therefore, the absorbing material must be selected so as to match the K emission line of the incident radiation to be used, or vice versa. Moreover, absorption can be maximized at the same time as scattering is minimized, to prevent resolution loss due to scattering. Furthermore, absorption will be greater the longer the wavelength of the chosen incident radiation.

One example of such a selected combination of incident radiation and absorbing species is chromium radiation (K = 2.29 angstroms) with titanium (K absorption edge at 2.49 angstroms).

Other examples with chromium radiation are scandium (K absorption edge at
2.75 A) and iodine (L absorption edge at 2.3 angstroms). An example using molybdenum radiation (K = 0.81 angstroms) is lead (L absorption edge at 0.78 angstroms). The...