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Browse Prior Art Database

Four Point Locator

IP.com Disclosure Number: IPCOM000080078D
Original Publication Date: 1973-Oct-01
Included in the Prior Art Database: 2005-Feb-26
Document File: 2 page(s) / 54K

Publishing Venue

IBM

Related People

Larsen, AH: AUTHOR [+5]

Abstract

Location of substrates into a predetermined position for subsequent work on the substrates is absolutely essential, in order to obtain repetition of manufacturing conditions. For example, when locating substrates which are to be aligned with a mask for photolithographic processing of patterns on the substrates, it is absolutely essential that the substrate be accurately aligned not only one to the other but with regard to the mask.

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Four Point Locator

Location of substrates into a predetermined position for subsequent work on the substrates is absolutely essential, in order to obtain repetition of manufacturing conditions. For example, when locating substrates which are to be aligned with a mask for photolithographic processing of patterns on the substrates, it is absolutely essential that the substrate be accurately aligned not only one to the other but with regard to the mask.

To this end, a four point locater box 10 having locating pins 11 and 12 is illustrated in Fig. 1. The substrates 14 are mounted in oversized apertures 13 in the box and then clamped as by the apparatus shown in Fig. 3.

The apparatus illustrated in Fig. 3 serves to locate and accurately center the substrates 14 therein, and is operated by a spring loaded double cam 15 which is connected to a central shaft 16, which reciprocates in a bushing 17 fixed to a plate 18. As shown, the shaft 16 includes a collar 16A with a compression spring 19 which is positioned intermediate the bushing 17 and the collar 16A. The jaws 20 and 21 are guided in slots, not shown, within the plate 18, the jaws being separate and including cam follower rollers 20A, 20B, 21A, 21B for cooperation with the opposite sides of the double cam 15.

A single handle lever 22 (Fig. 1) operates against a ball retainer which guides three steel balls on a rotary cam surface, not shown, against the bottom of the shaft 16 to effect elevation of the shaft 16, and...