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Device for Vacuum Coating Surfaces

IP.com Disclosure Number: IPCOM000080093D
Original Publication Date: 1973-Oct-01
Included in the Prior Art Database: 2005-Feb-26
Document File: 2 page(s) / 35K

Publishing Venue

IBM

Related People

Horstmann, RE: AUTHOR

Abstract

A device for vacuum coating interior surfaces by use of a sputter gun configuration, which allows the use of a wide variety of metals and provides controlled thickness, is proposed.

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Device for Vacuum Coating Surfaces

A device for vacuum coating interior surfaces by use of a sputter gun configuration, which allows the use of a wide variety of metals and provides controlled thickness, is proposed.

The device is essentially a rigid coaxial line the same length or greater than the tubing or surface to be coated, terminated in a cylindrical target of three types, (see Fig. 1), coupled to a 40 megahertz power source. Three versions have been utilized. Fig. la allows sputtering from both the inside and outside areas of the target. The Fig. 1b "folded" structure allows sputtering from the outside only, due to the formation of a dark space between the coaxial tubing and target. The Fig. 1c "wire cage" structure allows for axial deposition of sputtered material from the center, thus improving the deposition rate. Surfaces are coated by drawing the workpiece past the target at a slow rate approximately 200 A/min/inch. Addition of a cylindrical permanent magnet, with the direction of magnetization as indicated in Fig. 2, improves performance.

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