Browse Prior Art Database

Planetary Sensing Unit for Thin Film Deposition

IP.com Disclosure Number: IPCOM000080427D
Original Publication Date: 1973-Dec-01
Included in the Prior Art Database: 2005-Feb-27
Document File: 2 page(s) / 55K

Publishing Venue

IBM

Related People

Cole, SM: AUTHOR

Abstract

This is a method of controlling film thin sheet resistivity on aluminum oxide substrates, during vacuum deposition of nickel-chrome or other resistive layers in a vacuum deposition system.

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Planetary Sensing Unit for Thin Film Deposition

This is a method of controlling film thin sheet resistivity on aluminum oxide substrates, during vacuum deposition of nickel-chrome or other resistive layers in a vacuum deposition system.

A frustroconical drive hub 1 is rotated at constant speed to frictionally drive a plurality of circular circumferentially grooved pallets 2a,b...n,to cause them to rotate counterclockwise, as viewed in Fig. 1, and concurrently revolve in a circumferential path around a circular guide track 3 supported by framework 4. As shown, each pallet 2 is multilayered; i.e., it has a dielectric disk 5 sandwiched between a metallic substrate holder disk 6 and a metallic grooved backup disk 7 that rides in track 3. Each holder disk 6 has six support surfaces individually coated with dielectric to electrically isolate overlying substrates 8 from the metallic surface of holder disk 6, when the substrates are held against the surfaces by dielectric tabs 9.

Only one pallet, 2a, has a monitor substrate 10 on its substrate holder disk 6. The end areas x,y of substrate 10 have been precoated with resistive metal vacuum deposited to a preselected thickness to provide an initial value of resistivity; however, a central area z of predetermined area is initially devoid of any metal deposit. Substrate 10 is used as a control, in the manner below explained, to regulate the thickness of resistive metal that is vacuum deposited.

Graphite brush 11 has a conical tip 12 that projects into a conical recess coaxially disposed in drive hub 1. Electrical energy is supplie...