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Browse Prior Art Database

Chemical Visual Inspection of Polyimide Etch Completion

IP.com Disclosure Number: IPCOM000080554D
Original Publication Date: 1974-Jan-01
Included in the Prior Art Database: 2005-Feb-27
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Clark, RJ: AUTHOR [+2]

Abstract

In the formation of patter s on conformal coatings of polyimide prepolymer using photolithography techniques, it is desirable to determine, after etching, whether or not all prepolymer has been removed. The chemical inspection of the removal of prepolymer from a metallized electronic substrate personality pattern is accomplished, by submerging the etched work piece in an electroless tin plating bath.

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Chemical Visual Inspection of Polyimide Etch Completion

In the formation of patter s on conformal coatings of polyimide prepolymer using photolithography techniques, it is desirable to determine, after etching, whether or not all prepolymer has been removed. The chemical inspection of the removal of prepolymer from a metallized electronic substrate personality pattern is accomplished, by submerging the etched work piece in an electroless tin plating bath.

Electroless tin immersion will plate tin on exposed metal, in contrast to no plating on any remaining polyimide. A distinctive tin versus a gold coloration makes visual inspection and determination practical.

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