Browse Prior Art Database

Coupling for Vacuum or Pressure Seal

IP.com Disclosure Number: IPCOM000080579D
Original Publication Date: 1974-Jan-01
Included in the Prior Art Database: 2005-Feb-27
Document File: 3 page(s) / 57K

Publishing Venue

IBM

Related People

DaSilva, EM: AUTHOR [+3]

Abstract

Conventional coupling techniques for forming a vacuum or pressure seal between parts are inadequate, when the seal is to be made inside an enclosure where space is at a premium, or where access to the top and bottom of the coupling is inconvenient or impossible.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 53% of the total text.

Page 1 of 3

Coupling for Vacuum or Pressure Seal

Conventional coupling techniques for forming a vacuum or pressure seal between parts are inadequate, when the seal is to be made inside an enclosure where space is at a premium, or where access to the top and bottom of the coupling is inconvenient or impossible.

For example, in conventional sputtering apparatus, it is often inconvenient to make the required seal between the target holder and backing plate for the target. Since targets are often changed, ease and efficiency in changing them is quite advantageous. One approach to conveniently changing targets is to provide a threaded ring on the backing plate and mating threads in the target holder, such that the target assembly can be tightly screwed into the target holder and form a seal with an O-ring provided therein. Such an arrangement has been described in the IBM Technical Disclosure Bulletin, Vol.14, No.1, pp.221-222, June 1971. Several difficulties, however, existed with this removable target arrangement. For example, the size of the targets that could be employed was limited by the dimensions of the screw threads used to hold the target in place. In addition, it was required that the target be considerably handled, thereby tending to contaminate the target material.

In the sputtering arrangement partially shown in the figure, an interchangable target forms a vacuum seal by the use of cam screws, which provide an ability to address the seal from the periphery of the target. By such an arrangement, the handling of the target and the amount of space required to mount the target are minimized. In addition, by using cam screws as opposed to the above- mentioned "screw in" type device, the O-ring or metal gasket, which makes the seal, remains stationary, thereby reducing its chance of being stretched, worn, a...