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Forming Films in the MgO Al(2)O(3) System

IP.com Disclosure Number: IPCOM000080580D
Original Publication Date: 1974-Jan-01
Included in the Prior Art Database: 2005-Feb-27
Document File: 2 page(s) / 29K

Publishing Venue

IBM

Related People

Brownlow, JM: AUTHOR

Abstract

An inexpensive wet process is described for fabricating, for example, MgO and Mg(15) Al(1) Ox films. Such films may be employed in any of a variety of applications, such as the refractory overcoating used to protect the dielectric layers in gas panel displays.

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Forming Films in the MgO Al(2)O(3) System

An inexpensive wet process is described for fabricating, for example, MgO and Mg(15) Al(1) Ox films. Such films may be employed in any of a variety of applications, such as the refractory overcoating used to protect the dielectric layers in gas panel displays.

In one process, a solution, Mg, Al, NO(3), acetate, H(2)O, ammonia, acetic acid is made in propanol. The desired substrate upon which a film is to be made, is placed on a spinner. The surface of the substrate is flooded with solution and spun to make uniform in thickness. Typically, the substrate may be spun at 400- 600 rpms for one to two minutes. The substrate is then transferred to a drying oven at 60 Degrees -80 Degrees C. At this point, the film formed is reversibly soluble, until heated. Heating to 400 Degrees C - 700 Degrees C converts the salt film to Mg(1)Al(1-x)0(1.5-0.5x).

The following two solution compositions are given by way of example:

R 51 R 53

Propanol 88 cc 85
Mg acetate 1 g 8.4
Mg (NO(3))(2) . 6H(2)O 3 g 0.0 Al (NO(3))(3). 9H(2)O 0 0.95 Acetic acid 2.0 cc 2.8
NH(4)0H 2.64 cc 3.7 H(2)O 3 cc 0.0
PH 7.4 7.2
Thickness 400 - 600 Angstroms 1000 - 1500 Angs.

The solution designated R 51 provides a layer of pure MgO, while the solution designated R 53 provides a layer of Mg(15) Al(1)Ox. The aluminum acetal acetonate gelling agent (Al(NO(3))(3).9H(2)O) is added to the R 53 solution composition, in order to obviate the tendency of the MgO to break up into parti...