Browse Prior Art Database

Wafer Holder

IP.com Disclosure Number: IPCOM000080637D
Original Publication Date: 1974-Jan-01
Included in the Prior Art Database: 2005-Feb-27
Document File: 2 page(s) / 30K

Publishing Venue

IBM

Related People

Briska, M: AUTHOR [+3]

Abstract

The wafer holder shown in the figure permits holding a wafer in a horizontal position, which improves the homogeneity of material removal in hot, stirred etchants.

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Wafer Holder

The wafer holder shown in the figure permits holding a wafer in a horizontal position, which improves the homogeneity of material removal in hot, stirred etchants.

The wafer holder consists basically of a fork connected to a ring 1 by means of which the tool can be attached to transportation means, fixtures and the like. The fork has three prongs, the outer ones 2,3 are rigidly connected to each other and the center one 4 is movable perpendicular to the plane in which the other two prongs are positioned. The outer prongs 2, 3 have notches 5 close to their ends. The inserted wafer 6 is pressed into the notches 5 by the weight of the third prong 4.

For loading and unloading, the wafer holder, which is held in one hand, is positioned so that notches 5 open upwards, while the third prong is lifted up manually to allow the wafer 6 to be readily inserted or removed. The materials suitable for producing-such a wafer holder and which include glass, fused quartz, and plastics depend upon the etchant used.

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