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Automated Positive Pressure Oil Manometer

IP.com Disclosure Number: IPCOM000080662D
Original Publication Date: 1974-Jan-01
Included in the Prior Art Database: 2005-Feb-27
Document File: 2 page(s) / 39K

Publishing Venue

IBM

Related People

Carbone, QJ: AUTHOR [+2]

Abstract

Shown is an automated positive pressure oil manometer, which has been designed for the accurate measurement of gas flow rates required for the determination of vacuum system pumping speeds. Gas inlet pressures as high as 10 PSI, with vacuum outlet pressures, can be successfully employed. This feature allows vacuum pumping speed measurements (gas flow rate) to be determined for room air (atmospheric pressure), as well as specific sample gases normally stored at above atmospheric pressures.

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Automated Positive Pressure Oil Manometer

Shown is an automated positive pressure oil manometer, which has been designed for the accurate measurement of gas flow rates required for the determination of vacuum system pumping speeds. Gas inlet pressures as high as 10 PSI, with vacuum outlet pressures, can be successfully employed. This feature allows vacuum pumping speed measurements (gas flow rate) to be determined for room air (atmospheric pressure), as well as specific sample gases normally stored at above atmospheric pressures.

The manometer consists of two coaxial vertically positioned PYREX* tubes, which provide inner and outer columns 1 and 2, respectively. The outer column 2 is sealed at the bottom to form a reservoir 3, in which red colored butyl phthalate vacuum pumping fluid can be stored. Both PYREX* columns are necked down to a smaller diameter in the measurement section to allow close spacing of two light sources 4 and 5 and two photocells 6 and 7 forming the upper and lower collimated light paths 16 and 17. The distance between the two light paths and the ID of the inner column 1 have been calculated to provide a one cubic centimeter volume.

A typical operation for gas flow measurements to determine vacuum pumping system pumping speeds can be conducted in the following manner:
1. The outlet side of the manometer is connected to a needle

valve 8 mounted on the vacuum pumping system and the inlet is

connected to the gas supply. A Pace Model CD25 Pressure

Transducer can be use...